Measurement of Sub-Surface Microstructures Based on a Developed Ultrasonic Atomic Force Microscopy

Accurate and non-destructive technology for detection of subsurface defect has become a key requirement with the emergence various ultra-precision machining technologies application components. The combination acoustic technique sub-surface atomic force microscopy (AFM) measurement high resolution is potential method studying structure workpiece. For this purpose, contact-resonance AFM (CR-AFM) typical technique. In paper, CR-AFM system different principle from commercially available instruments set up used Si samples grating structures covered by thickness highly oriented pyrolytic graphite (HOPG). influence burial depth on capability studied simulations experiments. thickest HOPG film allowing proposed verified to be about 30 ?m, which much larger than feature size microstructure. manuscript introduces difference between topography principle, analyzes its advantages disadvantages. experimental results demonstrates that reveal microstructures relatively large buried engineering in technologies.